发明名称 Low residual-stress brazed terminal for heater
摘要 Embodiments of the present invention are directed to relieving the stresses caused by a mismatch in the coefficients of thermal expansion in the components forming the connections at the terminals of a heater. In one embodiment, a heater comprises a heater body having an electrical heating element and a bottom surface, and a rod configured to be coupled with an electrical power source. A plug has a first end which is coupled to the heater body and extends into the heater body through the bottom surface of the heater body, and which is electrically connected with the electrical heating element. The plug has a second end which includes a cavity to receive a portion of the rod. The cavity is surrounded by a slotted side wall of the plug which is disposed outside of the heater body and includes a plurality of slots extending from the second end toward the bottom surface of the heater body and terminating near the bottom surface but before reaching the bottom surface. The slotted side wall is connected with the rod received into the cavity. The rod and the plug have different coefficients of thermal expansion.
申请公布号 US6825448(B2) 申请公布日期 2004.11.30
申请号 US20030428527 申请日期 2003.05.01
申请人 APPLIED MATERIALS, INC. 发明人 GIANOULAKIS STEVEN E.
分类号 H01L21/00;H05B3/14;H05B3/68;H05B3/74;(IPC1-7):H05B3/68 主分类号 H01L21/00
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