ARTICLE COMPRISING SILICON SUBSTRATE AND BOND LAYER

摘要

PROBLEM TO BE SOLVED: To provide a bond coat which does not badly influence the mechanical properties of a silicon substrate. SOLUTION: The bond coat (14') of a silicon substrate (12) contains a first phase (30) and a second phase (40). The first phase (30) is selected from the group consisting of high-melting-point metal oxides, high-melting-point metal silicates, and their mixtures. The second phase (40) is selected from the group consisting of metals forming high-melting-point metal oxides, SiC, Si3N4, and their mixtures. COPYRIGHT: (C)2005,JPO&NCIPI