| 摘要 |
PROBLEM TO BE SOLVED: To improve adhesion between a sample surface and a prism and eliminate a fluctuation in measured data due to a measured region. SOLUTION: A thin film measuring apparatus uses total reflection absorption measurement, measures a thin film on the sample surface, and is provided with an entrance face 2a into which a measuring light enters, a contact face 2c closely attached to the sample 10, reflecting the measuring light on the sample surface once and capturing reflection light, a prism plate 2 having an emission face 2b from which the measuring light exits after it is reflected by the sample surface, a prism fixing plate 3 for fixing the prism plate 2 and a sample holder plate 4 for shocklessly holding the sample 10 and the prism fixing plate 3 and detachable to the prism fixing plate 3. The sample holder plate 4 shocklessly supports the sample surface and the contact face in parallel. COPYRIGHT: (C)2005,JPO&NCIPI |
