| 摘要 |
PROBLEM TO BE SOLVED: To enhance the safety of a constituting apparatus even if an unexpected situation arises when a plurality of stages are moved independently. SOLUTION: A stage apparatus includes a first moving unit 65A having a first movable element 62A connected to a first stage WST1, and a second moving unit 65B having a second movable element 62B connected to a second stage WST2. The stage apparatus also includes a plurality of regulators 104A, 104B each for regulating at least one of the first stage WST1 and the second stage WST2, and a plurality of evacuating units 108A, 108B for evacuating at least one of the plurality of the evacuation units in a second direction different from a first direction. COPYRIGHT: (C)2005,JPO&NCIPI |
