Graytone mask producing method, graytone mask and pattern transfer method

摘要

A method for producing a graytone mask capable of satisfying a dimensional accuracy of a predetermined graytone pattern, on a graytone mask having, at least in a part, a predetermined graytone pattern. Suppressed to �1% or less an on-plane distribution in thickness of a resist film to be applied onto a substrate in a graytone mask producing process.