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发明名称
一种光罩盒之增益结构改良
摘要
本发明为一种光罩盒之增益结构改良,特别是指一种得以弹性迎合确实顶固光罩片防止晃动与防止产生尘粒之新颖性结构设计,其主要系是利用一呈S形之顶固体设置于光罩盒体上下盖之角落处,以S形之顶固体末端顶压于光罩片之角端缘处,于施压顶固时,系利用S形之顶固体的圆弧弹性,迎合光罩片的厚度自行调整活动与顶压固定光罩片者。
申请公布号
TW200511362
申请公布日期
2005.03.16
申请号
TW092124142
申请日期
2003.09.01
申请人
家登精密工业股份有限公司
发明人
邱铭乾
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
陈庆尚
主权项
地址
台北县树林市八德街428号
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