发明名称 |
sp3 BONDING BORON NITRIDE THIN FILM HAVING SELF-FORMING SURFACE SHAPE BEING ADVANTAGEOUS IN EXHIBITING PROPERTY OF EMITTING ELECTRIC FIELD ELECTRON, METHOD FOR PREPARATION THEREOF AND USE THEREOF |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a material excellent in field electron emission properties which has high field strength resistance, emits electrons at a high current density and free from material deterioration. <P>SOLUTION: Regarding the material design, in the sp<SP>3</SP>bonding boron nitride film body, the surface shape excellent in field electron emission properties is formed in a self-forming manner by reaction from a vapor phase. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005076035(A) |
申请公布日期 |
2005.03.24 |
申请号 |
JP20030209489 |
申请日期 |
2003.08.29 |
申请人 |
NATIONAL INSTITUTE FOR MATERIALS SCIENCE |
发明人 |
KOMATSU SHOJIRO;MORIYOSHI YUSUKE;SHIMIZU SADAKI;OKADA KATSUYUKI |
分类号 |
C01B21/064;C23C16/34;C23C16/38;C23C16/48;H01J1/304;H01J9/02;(IPC1-7):C23C16/38 |
主分类号 |
C01B21/064 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|