发明名称 sp3 BONDING BORON NITRIDE THIN FILM HAVING SELF-FORMING SURFACE SHAPE BEING ADVANTAGEOUS IN EXHIBITING PROPERTY OF EMITTING ELECTRIC FIELD ELECTRON, METHOD FOR PREPARATION THEREOF AND USE THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a material excellent in field electron emission properties which has high field strength resistance, emits electrons at a high current density and free from material deterioration. <P>SOLUTION: Regarding the material design, in the sp<SP>3</SP>bonding boron nitride film body, the surface shape excellent in field electron emission properties is formed in a self-forming manner by reaction from a vapor phase. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005076035(A) 申请公布日期 2005.03.24
申请号 JP20030209489 申请日期 2003.08.29
申请人 NATIONAL INSTITUTE FOR MATERIALS SCIENCE 发明人 KOMATSU SHOJIRO;MORIYOSHI YUSUKE;SHIMIZU SADAKI;OKADA KATSUYUKI
分类号 C01B21/064;C23C16/34;C23C16/38;C23C16/48;H01J1/304;H01J9/02;(IPC1-7):C23C16/38 主分类号 C01B21/064
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