| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polishing liquid kit for a magnetic disk containing alumina, an oxidizer and acid, which can exhibit high polishing speed with good reproducibility irrespective of its preservation period, a method of polishing a magnetic disk substrate, and a method of manufacturing a good magnetic disk substrate. <P>SOLUTION: The polishing liquid kit for a magnetic disk comprises at least slurry (A) containing alumina, an oxidizer liquid (B) containing an oxidizer, and an acid liquid (C) containing an acid. The polishing method includes a step of supplying a mixture liquid obtained by mixing the slurry (A) containing alumina, the oxidizer liquid (B) containing an oxidizer and the acid liquid (C) containing an acid between the magnetic disk substrate and a polishing cloth for polishing the substrate. The manufacturing method for the magnetic disk substrate includes steps of: (1) preparing the polishing liquid by mixing the slurry (A) containing alumina, the oxidizer liquid (B) containing an oxidizer and the acid liquid (C) containing an acid; (2) bringing the magnetic disk substrate against the polishing cloth on a polishing surface plate for applying a pressure; and (3) moving the magnetic disk substrate and the surface plate for polishing the substrate while supplying the polishing liquid prepared in the step (1) between the substrate and the polishing cloth. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
