POSITIONING BOARD FOR POSITIONING HEATER LINES DURING PLASMA ENHANCED CVD,申请号KR20050003646U-传众专利搜索

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发明名称	POSITIONING BOARD FOR POSITIONING HEATER LINES DURING PLASMA ENHANCED CVD
摘要
申请公布号	KR200382858(Y1)	申请公布日期	2005.04.25
申请号	KR20050003646U	申请日期	2005.02.07
申请人		发明人
分类号	H01L21/205;H01L21/68;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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