发明名称 Integrated structure with microwave components
摘要 A semiconductor device has a silicon layer and a first dielectric layer. A transistor has a drain and a source that are at least partially in the silicon layer. The transistor further has a gate and a spacer defining the gate. The first dielectric layer forms the spacer. A capacitor has first and second electrodes, the first electrode is formed at least partially in the silicon layer, and the first dielectric layer provides a dielectric for the capacitor between the first and second electrodes. A resistor has a resistive region formed at least partially in the silicon layer and has first and second resistor contact areas defined by the first dielectric layer. A second dielectric layer electrically isolates the transistor, the capacitor, and the resistor from conductive lines.
申请公布号 US6888219(B2) 申请公布日期 2005.05.03
申请号 US20020230680 申请日期 2002.08.29
申请人 HONEYWELL INTERNATIONAL, INC. 发明人 KEYSER THOMAS R.
分类号 H01L21/84;H01L27/12;H01L29/94;(IPC1-7):H01L27/108;H01L29/04;H01L29/76;H01L31/112;H01L31/119;H01L31/36 主分类号 H01L21/84
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