| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide structure which is capable of reducing the radius of curvature up to 10μm or less, has small propagation loss and permits excellent coupling with an optical fiber, to provide a manufacturing method of the optical waveguide structure and to provide a structure of the optical waveguide for realizing such a feature that the characteristics of optical wavelength elements do not depend on the polarization direction in the various optical waveguide elements constituted by using the waveguide structure. SOLUTION: The optical waveguide structure 100 has a lower part clad layer 1 consisting of SiO<SB>2</SB>glass in the optical waveguide formed on a substrate, has a core 2 consisting of Si thereon and is constituted so that the total containing the core 2 is covered with a clad layer 3 consisting of SiO<SB>2</SB>glass or polymer material. In addition, in order to allow the optical waveguide structure to be independent of temperature, the upper clad layer 3 is covered with polymer material (PMMA, polyimide etc.) of which the refractive index is approximately equal to that of SiO<SB>2</SB>glass and the temperature coefficient of the refractive index has an opposite sign to that of SiO<SB>2</SB>glass. COPYRIGHT: (C)2005,JPO&NCIPI |
