| 摘要 |
PROBLEM TO BE SOLVED: To measure the pressure of a fluid with higher accuracy in a pressure detector.SOLUTION: A pressure propagation element 28 constituting a pressure detector has a propagation member 32 inserted through a through hole 24 of a body 16 that communicates with a passage 22, and a coupling member 34 coupled to the flange part 38 of the propagation member 32, the head part 46 of the coupling member 34 being bonded to the sensor part 54 of a pressure sensor 18. A seal part 42 provided in the outer edge portion of the flange part 38 is held between the bottom face 26a of a sensor chamber 26 and the underside of the pressure sensor 18 in the body 16. A shank 36 of the pressure propagation element 28 is pressed upward by a pressure fluid flowing in a passage 22 and a sensor part 54 of the pressure sensor 18 is pressed via the coupling member 34, whereby the flow rate of the pressure fluid based on the pressing force detected by the pressure sensor 18 is detected.SELECTED DRAWING: Figure 1 |
