Interferometric measuring device

摘要

The interferometric measuring device ( 1 ) for measuring the shape of a surface of an object (O) has a radiation source (LQ), a beam splitter (ST) producing an object beam (OS) guided along an object light path to the object (O) and a reference beam (RS) guided along a reference light path to a reflective reference plane (RSP), an image recorder (BA) that records interfering radiation reflected by the object (O) and the reference plane (RSP) and an associated evaluation device (E) to determine the surface shape. A favorable adaptability and operation are achieved by arrangement of a fixed lens system (SO) that produces a fixed intermediate image (SZB) in the object light path and a movable lens system (BO) that is movable in a direction of its optical axis for depth scanning. The image recorder (BA) has pixels arranged next to each other on an extended planar surface.