发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor element capable of enhancing the light confinement effect of a silicon semiconductor, without making the process complicated. <P>SOLUTION: The manufacturing method of the semiconductor element includes the steps of dissolving silver to an electrolyte containing hydrogen fluoride; and contacting an n-type single crystal silicon substrate 1 with the electrolyte, into which silver is dissolved to form a rugged shape 1a onto the surface of the n-type single crystal silicon substrate 1 without the need for power application. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2005277208(A) 申请公布日期 2005.10.06
申请号 JP20040090042 申请日期 2004.03.25
申请人 SANYO ELECTRIC CO LTD 发明人 MURATA KAZUYA
分类号 H01L21/308;H01L31/04;(IPC1-7):H01L21/308 主分类号 H01L21/308
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