| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing apparatus employing a polygon mirror capable of processing an object without exchanging arrangements, preventing a recast phenomenon, and processing the object, such as a wafer, with high precision dimension. <P>SOLUTION: As the apparatus for processing the object by utilziing a laser beam, the apparatus employing the polygon mirror includes a laser generator for generating and emitting the laser beam, a polygon mirror rotating at the axis as a center and having a plurality of reflection planes which reflect the laser beam incident thereon from the laser generator, and a lens irradiating the laser beam on an object after condensing the laser beam reflected from the polygon mirror. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
