VIBRATION INSULATING SYSTEM, VIBRATION INSULATING METHOD, LITHOGRAPHY DEVICE, AND METHOD FOR MANUFACTURING THE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vibration insulating system to stabilize an unstable nature mode without lowering insulation in other direction and damping performance.

SOLUTION: The vibration insulating system includes an active isolator to insulate and damp a body in an unstable direction. However. the passive actuator sometimes uses a damping force not only in an unstable direction simultaneously in the other stable direction through mechanical combination in a stable direction and an unstable direction. As a result, damping and insulation in the other stable direction are sometimes lowered due to active insulation and damping. Through adoption of mode separation, namely decomposition and damping of arbitrary vibration in an independent direction, arbitrary vibration in an unstable direction can be compensated without exerting an influence on arbitrary other probably insulation and damping performance in a stable direction by compensation of arbitrary vibration in an unstable direction.

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