摘要 |
PROBLEM TO BE SOLVED: To provide a work storing cassette storing sheet-like works divided into individual chips by dicing work using a very thin dicing plate and dicing work using cutting technology by a laser beam without the interference of adjacent edges of the respective chips. SOLUTION: The work storing cassette 10 is provided with a plurality of racks 15 whose one direction is opened and in which individual works W are stored and a plurality of work supporting plates 16 on which the works W are placed on upper faces and which are slidably inserted into the racks 15. The works W are supported and stored by the work support plates 16 at the whole works. The works W are prevented from being bent by gravity. Even if the works W are sheet-like works divided into individual chips, the adjacent edges of the chips are prevented from interfering each other. COPYRIGHT: (C)2006,JPO&NCIPI |