发明名称 WORK STORING CASSETTE
摘要 PROBLEM TO BE SOLVED: To provide a work storing cassette storing sheet-like works divided into individual chips by dicing work using a very thin dicing plate and dicing work using cutting technology by a laser beam without the interference of adjacent edges of the respective chips. SOLUTION: The work storing cassette 10 is provided with a plurality of racks 15 whose one direction is opened and in which individual works W are stored and a plurality of work supporting plates 16 on which the works W are placed on upper faces and which are slidably inserted into the racks 15. The works W are supported and stored by the work support plates 16 at the whole works. The works W are prevented from being bent by gravity. Even if the works W are sheet-like works divided into individual chips, the adjacent edges of the chips are prevented from interfering each other. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005332868(A) 申请公布日期 2005.12.02
申请号 JP20040147755 申请日期 2004.05.18
申请人 TOKYO SEIMITSU CO LTD 发明人 SAKATANI YASUYUKI;AZUMA MASAYUKI
分类号 H01L21/673;H01L21/301;H01L21/50;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/673
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