Electronic device and method for manufacturing the same

摘要

An electronic device is provided using wiring comprising aluminum to prevent hillock or whisker from generating, wherein the wiring contains oxygen atoms at a concentration of 8x10¹⁸ atoms.cm^-3 or less, carbon atoms at a concentration of 5x10¹⁸ atoms.cm^-3 or less, and nitrogen atoms at a concentration of 7x10¹⁷ atoms.cm^-3 or less; furthermore, a silicon nitride film is formed on the aluminum gate, and an anodic oxide film is formed on the side planes thereof.