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发明名称
摘要
申请公布号	KR100500499(B1)	申请公布日期	2005.12.30
申请号	KR19980706195	申请日期	1998.08.11
申请人		发明人
分类号	G03F7/09;H01L21/027;G03F7/004;G03F7/022;G03F7/11;G03F7/32;G03F7/38;G03F7/40	主分类号	G03F7/09
代理机构		代理人
主权项
地址

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