| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro positioning device preventing deterioration of a vacuum atmosphere and exhibiting good positioning accuracy. SOLUTION: This micro positioning device is provided with a positioning target part 4, base parts 2 and 3 supporting the positioning target part 4 displaceably, a thermal expansion part 10 arranged between the positioning target part 4 and the base parts 2 and 3 and expanding/shrinking according to a temperature change, and a temperature regulation part 11 heating/cooling the thermal expansion part 10. In this micro positioning device, positioning is carried out according to thermal expansion/shrinkage by heating or expanding/shrinking the thermal expansion part 10. COPYRIGHT: (C)2006,JPO&NCIPI |
