| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of dynamically performing the focusing of an imaging mechanism on a moving target front surface having a variable shape. SOLUTION: The focusing of the imaging mechanism on the target front surface is dynamically performed by the steps of (1) making a model of a geometry of the target front surface, (2) measuring relative positions at a predetermined number of places on the target front surface, (3) applying the model to the target front surface by using the predetermined number of places on the target front surface, and (4) performing focusing of the imaging mechanism on the moving target front surface by using data obtained by applying the model to the target front surface. COPYRIGHT: (C)2006,JPO&NCIPI |
