| 摘要 |
PURPOSE: A method is provided to allow for ease of inspection of pattern defects by performing a pattern inspection process prior to a heating process of a basic plating layer. CONSTITUTION: A method comprises a step of forming a basic plating layer(101) including two or more plating layers on a conductor pattern(13) constituted by a conductor layer formed on an insulation layer(11), and a step of heating the resultant structure. The method further includes a step of inspecting pattern defects for inspecting pattern defects by recognizing the conductor pattern formed on the basic plating layer. The step of inspecting pattern defects is performed after the basic plating layer forming step and prior to the heating step. |
