| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enhance the dust resistance of an optical path duct equipped on a laser beam machine. <P>SOLUTION: An optical path system of a laser beam machine has an optical path duct 10 of a U-shaped section with a top thereof opened, and a clean air is fed into the optical path 12. A gutter 110 is provided on each of both sides of the optical path duct 10, and a liquid 120 is poured therein. A laser beam take-out device 50 traveling on the optical path duct 10 has a panel 150 on each of both sides, and a skirt part 152 at a tip-end of the panel 150 is immersed in the liquid 120 to constitute a liquid seal. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
