| 摘要 |
In the bottom face of a head plate (14), a recessed portion (14A) open to the front of a prober chamber (11) is formed. In the recessed portion (14A), a card exchange mechanism (20) for exchanging a probe card (13) is arranged. The exchange mechanism (20) includes a card supporting member (21) for supporting thereon the probe card (13), retractable mechanisms (22), air cylinders (24) and cam mechanisms (35). The retractable mechanisms (22) are designed to move the supporting member (21) in substantially horizontal directions between a connecting position of the probe card (13) corresponding to a pogo ring (16), and a region near a side opening of a case (10C). The air cylinders (24) and the cam mechanisms (35) are designed to move the supporting member (21) in vertical directions with respect to the head plate (14) so as to connect/disconnect the probe card (13) to/from a test head (15) via the pogo ring (16). <IMAGE> |
