LIGHT IRRADIATION METHOD AND LIGHT IRRADIATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To perform the irradiation of light rays to be made corresponding to the thermal deformation of a preheated substrate.

SOLUTION: A thin film phosphor material formed on the glass substrate is crystallized by moving a stage (2) in the y-direction to read a mark (M) provided along an area-to-be-irradiated of the substrate (P) by a sensor (5) while scanning the substrate (P) with an irradiation spot (E) in the y-direction and shifting the optical axis of a light beam (A) by a movable mirror (6) to move the irradiation spot (E) to the x-direction to follow the shape of the mark (M).

COPYRIGHT: (C)2009,JPO&INPIT