发明名称 |
Fabrication of nanoporous antireflection film |
摘要 |
A nanoporous antireflection coating preparation method. A sol-gel precursor solution containing an organic template is coated onto a substrate. The sol-gel precursor solution containing the organic template is dried into a film. The organic template within the film is then removed to form a nanoporous antireflection coating. In preferred embodiments, the organic template is removed by UV-O3 treatment at ambient temperature.
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申请公布号 |
US7598595(B2) |
申请公布日期 |
2009.10.06 |
申请号 |
US20060453932 |
申请日期 |
2006.06.16 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
CHAO KUEI-JUNG;HUANG KUO-YING;CHEN SHU FANG |
分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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