Thin film transistor, and thin film transistor array panel and organic light emitting diode display including the same

摘要

A thin film transistor includes a semiconductor which is disposed on a substrate and includes a source region, a drain region and a channel region, a gate insulating layer disposed on the semiconductor, a gate electrode disposed on the gate insulating layer, an interlayer insulating layer disposed on the gate electrode, contact holes defined in the interlayer insulating layer, the contact holes respectively exposing the source region and the drain region of the semiconductor, and a source electrode and a drain electrode which are disposed on the interlayer insulating layer and respectively contact the source region and the drain region through the contact holes, where at least one of the contact holes exposing the source region and the drain region obliquely traverses the semiconductor.

主权项

1. An organic light emitting diode display comprising:
a substrate; a gate line disposed on the substrate and extended in a first direction; a data line and a driving voltage line disposed on the substrate and extended in a second direction intersecting the first direction; a switching thin film transistor connected to the gate line and the data line, and including a first semiconductor; a driving thin film transistor connected to a drain electrode of the switching thin film transistor, and including a second semiconductor, and the first semiconductor and the second semiconductor respectively include a source region, a drain region and a channel region; an insulating layer disposed on the first semiconductor and second semiconductor, and contact holes defined in the insulating layer, the contact holes respectively exposing the source region and the drain region of the first semiconductor and the second semiconductor; and an organic light emitting diode connected to the driving thin film transistor, wherein at least one of the contact holes is inclined with respect to the first direction and the second direction.