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发明名称
TARGET MOUNTING DEVICE FOR SEQUENTIAL SPUTTERING
摘要
申请公布号
US3756939(A)
申请公布日期
1973.09.04
申请号
USD3756939
申请日期
1971.10.14
申请人
MATERIALS RES CORP,US
发明人
HURWITT S,US
分类号
C23C14/34;H01J37/34;(IPC1-7):C23C15/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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