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发明名称
摘要
申请公布号
FR2177750(A1)
申请公布日期
1973.11.09
申请号
FR19730005440
申请日期
1973.02.06
申请人
IBM,US
发明人
分类号
C25D11/04;H01L21/00;H01L21/28;H01L21/3063;H01L21/316;H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L1/14;C23F17/00;H01L19/00
主分类号
C25D11/04
代理机构
代理人
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地址
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