Cooling water jet pack for high power rotary cathodes

摘要

A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.

主权项

1. A sputtering target assembly, comprising:
a cylindrical backing tube; a magnet assembly disposed within the backing tube, such that a gap volume is formed between the magnet assembly and an inner surface of the backing tube; and a conduit disposed within the backing tube and configured to provide coolant directly into the gap volume, at an angle α of 45° or less, the conduit comprising:
a coolant plenum disposed within the backing tube adjacent to a back portion of the magnet assembly; anda coolant channel fluidly connected to the coolant plenum and located adjacent to the side portion of the magnet assembly, wherein: the angle α is taken with respect to a first line along which coolant initially flows out of the conduit, and a second line tangential to the backing tube at a point where the first line intersects the inner surface of the backing tube; substantially all of the coolant in the gap volume flows in a single circumferential direction that is substantially perpendicular to a longitudinal axis of the cylindrical backing tube; the coolant plenum, the coolant channel and the gap volume form a coolant circuit; and the sputtering target assembly lacks a wiper fin, rubber stopper, gasket, seal or roller which contacts an inner surface of the backing tube.