Stage Device and Charged Particle Beam Device Using the Same

摘要

To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by temperature increase caused by heat generated by a linear motor. The stage device including a table, a linear motor driving the table in a prescribed direction, in which the table and a moving part of the linear motor are connected by components, a slide unit is attached to the component, movement of which is constrained by a rail fixed to a base, and at the same time, the slide unit is positioned vertically below a place where the component is joined to the table, thereby suppressing thermal deformation of the table.

主权项

1. A stage device including a first table for placing a sample, a first drive mechanism moving the first table in a first direction, a second table for placing the first table and a second drive mechanism moving the second table in a second direction, the device comprising:
a rail guiding the second table to the second direction; a slide unit moving on the rail; and a connecting member interposed between the second table and the second drive mechanism, wherein the connecting member and the slide unit are arranged so that a virtual straight line extending in a third direction orthogonal to the first direction and the second direction passes therethrough.