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发明名称
摘要
申请公布号
JPS5073582(A)
申请公布日期
1975.06.17
申请号
JP19730121953
申请日期
1973.10.30
申请人
发明人
分类号
H01L27/146;H01L31/10
主分类号
H01L27/146
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