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发明名称
摘要
申请公布号
JPS50122169(A)
申请公布日期
1975.09.25
申请号
JP19750024918
申请日期
1975.02.28
申请人
发明人
分类号
C30B15/20;C30B15/32;C30B15/36;C30B33/00;H01L21/208
主分类号
C30B15/20
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代理人
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