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发明名称
摘要
申请公布号
FR2156617(B3)
申请公布日期
1975.10.17
申请号
FR19720034052
申请日期
1972.09.26
申请人
MAX PLANCK GESELLSCHAFT,DT
发明人
分类号
H01J49/14;(IPC1-7):H01J39/00;G01M3/00;G01N27/00
主分类号
H01J49/14
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