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发明名称
KAGOBUTSUHANDOTAI NO SEIZOSOCHI
摘要
申请公布号
JPS5150660(A)
申请公布日期
1976.05.04
申请号
JP19740124375
申请日期
1974.10.30
申请人
HITACHI LTD
发明人
SHIGE NORYUKI;PPONMA KOJI
分类号
C30B19/06;H01L21/208
主分类号
C30B19/06
代理机构
代理人
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地址
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