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发明名称
HANDOTAIKISOSEICHOSOCHI
摘要
申请公布号
JPS5174573(A)
申请公布日期
1976.06.28
申请号
JP19740148143
申请日期
1974.12.25
申请人
HITACHI LTD
发明人
INOE HIRONORI;SUZUKI TAKAYA
分类号
C30B25/14;C23C16/44;C23C16/455;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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