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发明名称
VERFAHREN ZUR REINIGUNG POLIERTER HALBLEITERSCHEIBEN
摘要
申请公布号
DE2526052(A1)
申请公布日期
1976.12.30
申请号
DE19752526052
申请日期
1975.06.11
申请人
WACKER CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK GRUNDSTOFFE MBH
发明人
GRIESSHAMMER,RUDOLF,DIPL.-CHEM.DR.
分类号
H01L21/308;C23G1/00;C23G3/00;H01L21/00;H01L21/306;(IPC1-7):H01L21/30
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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