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发明名称
PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5248473(A)
申请公布日期
1977.04.18
申请号
JP19750124814
申请日期
1975.10.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
KUSANO YUUJI
分类号
H01L29/73;H01L21/31;H01L21/3205;H01L21/331;H01L23/52;H01L29/06;H01L29/40;H01L29/417
主分类号
H01L29/73
代理机构
代理人
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地址
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