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发明名称
ETCHING PROCESSING APPARATUS
摘要
申请公布号
GB1513976(A)
申请公布日期
1978.06.14
申请号
GB19760033104
申请日期
1976.08.09
申请人
IWATSU ELECTRIC CO LTD
发明人
分类号
B41F7/20;B41N3/08;C23F1/08;G03F7/30;(IPC1-7):B44C1/22
主分类号
B41F7/20
代理机构
代理人
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地址
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