| 发明名称 |
METHOD FOR FORMING CUT GROOVES |
| 摘要 |
PURPOSE:To provide a method for forming cut grooves, wherein, in forming on a base plate cut grooves for dividing a thin base plate of a thickness dimension of 150mum or less, such as a piezo-electric base plate or the like into plurality of individual pieces, the base plate can be held on a table without bonding. |
| 申请公布号 |
JPS53112590(A) |
申请公布日期 |
1978.10.02 |
| 申请号 |
JP19770027171 |
申请日期 |
1977.03.11 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
SHIMIZU KAORU;UCHIDA KEIJI |
| 分类号 |
B23D47/04;B23Q3/08;B26D1/14;B28B11/00;B28B11/08;B28D1/22;B28D5/02;H01L21/301;H01L41/22 |
主分类号 |
B23D47/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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