Reflecting optical member, optical system, exposure apparatus, and device manufacturing method

摘要

An exit-side fly-eye mirror is provided with a first mirror block having a mirror element as one of a plurality of mirror elements, and a second mirror block having a mirror element as one of the plurality of mirror elements. The first mirror block has a connecting part that protrudes from an area other than the mirror surface of the mirror element, the connecting part providing a connection to the second mirror block. With the connecting part of the first mirror block, a plurality of mirror elements that includes the mirror element of the second mirror block is positioned relative to the mirror element of the first mirror block.

主权项

1. A reflective optical member including a plurality of mirror elements that are set on a setting surface of a base, wherein each mirror element includes a reflective portion that reflects light, the reflective optical member comprising:
a first mirror block including a first mirror element among the plurality of mirror elements; and a second mirror block including a second mirror element among the plurality of mirror elements, wherein the first mirror block includes a coupling portion that protrudes from the first mirror element at a portion differing from the reflective portion of the first mirror element, and the second mirror element includes an engagement portion that is engaged with the coupling portion.