PATTERN TRANSCRIBING METHOD AND TRANSCRIBING INTERMEDIATE BODY

摘要

PURPOSE:To secure a high-accuracy pattern transcription by forming an intermediate body which possesses a convexity on the resist of the transcribed subject or at the transcribing mask with use of the irradiation characteristics of the resist due to th the ion beam and thus producing a gap of under several mum - 1mum between the transcribing mask and the transcribed subject.