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发明名称
PROCEDE POUR FABRIQUER DES STRUCTURES MULTICOUCHES A PORTES DE SILICIUM SUR UNE COUCHE DE SILICIUM SEMI-CONDUCTRICE
摘要
申请公布号
BE870699(A1)
申请公布日期
1979.01.15
申请号
BE19780190662
申请日期
1978.09.22
申请人
SIEMENS A.G.
发明人
分类号
H01L27/10;H01L21/28;H01L21/3105;H01L21/314;H01L21/321;H01L21/339;H01L21/768;H01L21/8242;H01L27/108;H01L29/78;(IPC1-7):H01L/
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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