| 发明名称 |
SURFACE INSPECTING APPARATUS |
| 摘要 |
PURPOSE:To make possible detecting defects on surface by radiating coherent light such as gas laser light to the groove face on a record disc surface and comparing and judging the shape of the diffraction patterns obtained as reflected light. |
| 申请公布号 |
JPS5414789(A) |
申请公布日期 |
1979.02.03 |
| 申请号 |
JP19770080634 |
申请日期 |
1977.07.05 |
| 申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
KAMEI MITSUHITO |
| 分类号 |
G11B3/68;G01B11/30;G01N21/88;G01N21/94;G01N21/95;G01N21/956;G11B7/0037;G11B7/26 |
主分类号 |
G11B3/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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