POLYMERS OF MALEIMIDE AND CYCLOOLEFINIC MONOMERS AS PERMANENT DIELECTRIC MATERIALS

摘要

Various cycloolefinic/maleic anhydride/maleimide polymers and compositions thereof useful for forming self-imageable films encompassing such polymers are disclosed. Such polymers encompass norbornene-type repeating units, maleimide repeat units and maleic anhydride-type repeating units where at least some of such maleic anhydride-type repeating units have been ring-opened. The films formed from such polymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.

主权项

1. A polymer comprising:
one or more distinct first repeating unit represented by formula (IA), each of said first repeating unit is derived from a monomer of formula (I): wherein: represents a position at which the bonding takes place with another repeat unit; m is an integer 0, 1 or 2; R1, R2, R3 and R4 are each independently of one another selected from the group consisting of hydrogen, linear or branched (C1-C16)alkyl, hydroxy(C1-C12)alkyl, perfluoro(C1-C12)alkyl, (C3-C12)cycloalkyl, (C6-C12)bicycloalkyl, (C7-C14)tricycloalkyl, (C6-C10)aryl, (C6-C10)aryl(C1-C3)alkyl, perfluoro(C6-C10)aryl, perfluoro(C6-C10)aryl(C1-C3)alkyl, (C5-C10)heteroaryl, (C5-C10)heteroaryl(C1-C3)alkyl, hydroxy, (C1-C12)alkoxy, (C3-C12)cycloalkoxy, (C6-C12)bicycloalkoxy, (C7-C14)tricycloalkoxy, —(CH2)a—O—(CH2)b)c—O—(C1-C4)alkyl, where a, b and c are integers from 1 to 4, (C6-C10)aryloxy(C1-C3)alkyl, (C5-C10)heteroaryloxy(C1-C3)alkyl, (C6-C10)aryloxy, (C5-C10)heteoaryloxy, (C1-C6)acyloxy and halogen; one or more distinct second repeating unit represented by formula (IIA) or (IIB), each of said second repeating unit is derived from a monomer of formula (II): wherein: R5, R6, R7 and R8 are each independently of one another selected from the group consisting of hydrogen, linear or branched (C1-C9)alkyl, fluorinated or perfluorinated(C1-C9)alkyl, (C1-C12)alkoxy(C1-C12)alkyl and (C1-C12)alkoxy(C1-C12)alkoxy(C1-C12)alkyl; one or more distinct third repeating unit represented by formula (IIIA), each of said third repeating unit is derived from a monomer of formula (III): wherein: R9 and R10 are each independently of one another selected from the group consisting of hydrogen, linear or branched (C1-C12)alkyl, (C3-C8)cycloalkyl, (C6-C12)aryl and (C6-C12)aryl(C1-C12)alkyl; and R11 is selected from linear or branched (C1-C12)alkyl, (C3-C8)cycloalkyl, (C6-C12)aryl and (C6-C12)aryl(C1-C12)alkyl; and wherein each of said first, second and third repeat units, where valence is permissible, is optionally substituted with one or more groups selected from linear or branched (C1-C6)alkyl, (C3-C7)cycloalkyl, (C1-C6)perfluoroalkyl, (C1-C6)alkoxy, (C3-C7)cycloalkoxy, (C1-C6)perfluoroalkoxy, halogen, hydroxy, linear or branched hydroxy(C1-C6)alkyl, acetoxy, phenyl, hydroxyphenyl and acetoxyphenyl.