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发明名称
VERFAHREN ZUR ERZEUGUNG LICHTLEITENDER STRUKTUREN DURCH IONENIMPLANTATION
摘要
申请公布号
DD144481(A1)
申请公布日期
1980.10.15
申请号
DD19790213756
申请日期
1979.06.20
申请人
GOETZ,GERHARD,DD;GEILER,HANS-DIETER,DD;ZIEGLER,WOLFGANG,DD
发明人
GOETZ,GERHARD,DD;GEILER,HANS-DIETER,DD;ZIEGLER,WOLFGANG,DD
分类号
H01L21/263;(IPC1-7):H01L21/263
主分类号
H01L21/263
代理机构
代理人
主权项
地址
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