| 摘要 |
PURPOSE:To improve photoelectric convertion efficiency of a solar battery excessively by fabricating an amorphous thin film solar battery of an amorphous semiconductor thin film which is made from monosilane and an amorphous semiconductor thin film which is made from silicon tetrafluoride. CONSTITUTION:A transparent conductive film 2 is formed on a glass substrate 1, and next thereto n-type and intrinsic amorphous semiconductor layers 3 and 4 which are made from an amorphous semiconductor materials of which main components are silicon and fluorine which are produced by glow discharge in silicon tetrafluoride are formed, and next thereto a p-type amorphous semiconductor layer 5 which is made from an amorphous semiconductor materials of which main components are silicon and hydrogen which are produced by glow discharge in monosilane is formed. Next thereto an aluminum electrode 6 is formed by evaporation of an electron beam evaporation apparatus. |
