Lamp holder for projection aligner

摘要

A lamp holder that compensates for thermally induced expansion of an arcuate lamp is disclosed. Each end of the arcuate lamp is secured to a relatively flexable lamp support. In the preferred embodiment the lamp support at one end is moveable generally in a plane containing the arcuate lamp, while the lamp support at the other end is moveable generally in a plane that intersects the plane of the lamp. The resulting horizontal and vertical freedom of movement compensates for thermal expansion of the lamp during lamp operation. Both lamp supports are mounted on a lamp holder base, having a plurality of locator pin apertures therein that are cooperatively operative with locator pins positioned on the base of a lamp holder housing. The locator pins and locator pin apertures accurately position the arcuate lamp with respect to an optical system. Forced fluid cooling of the lamp is provided through the lamp holder housing.