发明名称 METHOD OF TRIMMING FILM RESISTOR
摘要 <p>PURPOSE:To accurately regulate the resistance value of a fine resistor by trimming a film resistor connected between a pair of electrode conductors from one electrode conductor side. CONSTITUTION:A predetermined voltage is applied between electrode conductors 1a to monitor the resistance value via an electric current of a film resistor 2, the resistor 2 is trimmed at the positions 3a, 3b in parallel with a side connected with an electrode 1a, is roughly regulated with resistors 2a-2c, and the resistor 2c is then trimmed at the position 3c to finely regulate the resistance value. When the number of the trimming positions 3a-3c is determined, the rate of change of the resistance value of the resistor 2 can be determined merely by the ratio of the width D to the width W of the film resistor 2. Accordingly, even if the trimming positions are displaced and the parallelism with the resistor 2 is displaced due to the irregularity of the geometrical size of the supporting substrate of the electrode conductor 1a and the film resistor 2 and of the position and the size of the conductor 1a and the resistor 2, the rate of the chang of the resistance value is not affected to execute the trimming with preferable productivity in high accuracy.</p>
申请公布号 JPS561555(A) 申请公布日期 1981.01.09
申请号 JP19790078404 申请日期 1979.06.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 HIDA TOSHIO;ONIOKA IWAO
分类号 H01C17/24;H01L21/70;H01L27/01 主分类号 H01C17/24
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