| 摘要 |
PURPOSE:To uniform the temperature in the guide and on the wall of the guide, by forming the return path of fluid with the section plate between the lower side of outer wall and the spacer of the lower side plate of the inner guide, in the waveguide suitable for the transmission and the radiation for large power of microwave wave for the heating of plasma by means of electromagnetic waves. CONSTITUTION:The electromagnetic waves incoming from the direction toward the arrow 1 propagate in the inner guide 2 of waveguide and radiate to the arrow 4 from the aperture of the open end 3. One set of aperture waveguide is constituted by a plurality of the unit parts 5 of the waveguide in bundle, and the spacer 7 is extended axially on the side wall 6 of the inner guide 2 and in the inner guide 2 itself. The waveguide outer guide 9 encloses the inner guide 6 so that the fluid path 8 can be formed with the spacer 7. Further, bwteen the lower side plate 10 of the outer guide 9 and the spacer 12 provided with the lower side plate 11 of the inner guide 6, the section plate 14 forms the fluid return path 13. Thus, the fluid for use of cooling can uniform the temperature on the guide wall in the guide. |
